Particle detectors made of high-resistivity Czochralski silicon
نویسندگان
چکیده
We have processed pin-diodes and strip detectors on nand p-type high-resistivity silicon wafers grown by magnetic Czochralski method. The Czochralski silicon (Cz-Si) wafers manufactured by Okmetic Oyj have nominal resistivity of 900O cm and 1.9 kO cm for nand p-type, respectively. The oxygen concentration in these substrates is slightly less than typically in wafers used for integrated circuit fabrication. This is optimal for semiconductor fabrication as well as for radiation hardness. The radiation hardness of devices has been investigated with several irradiation campaigns including lowand high-energy protons, neutrons, g-rays, lithium ions and electrons. Cz-Si was found to be more radiation hard than standard Float Zone silicon (Fz-Si) or oxygenated Fz-Si. When irradiated with protons, the full depletion voltage in Cz-Si has not exceeded its initial value of 300V even after the fluence of 5 10 cm 2 1-MeV eq. n cm 2 that equals more than 30 years operation of strip detectors in LHC experiments. r 2005 Elsevier B.V. All rights reserved.
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